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| The Crystal Growth Load Meter is a load sensor that changes weight into an electronic signal for the purpose of
diameter control of single crystal growth in manufacturing processes such as those for semiconductors. |
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- It consists of a load sensitivity part (load cell), an amplification part, a slip ring, and the housing it is contained in.
- The load sensitivity part uses a high performance/high resolution load cell with nonlinear and hysteresis characteristics and a repeatability of 0.02%Rated Output
- Its temperature characteristics are very stable with 0.03%Rated Output/10 degrees C (zero point change + sensitivity change).
- It is superb in terms of revolution noise.
- As there is an overload safeguard function for loads from an opposite direction, it is safe even in the case of overloading.
- A model that can be used for raising in a vacuum is also available.
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| Maximum Load |
120%Rated Capacity |
| Non-linearity |
0.02%Rated Output |
| Hysteresis |
0.02%Rated Output |
| Repeatability |
0.02%Rated Output |
| Temperature Dirift |
0.03%Rated Output/10ºC Celcius |
| Zero adjustable |
Approx. ±20%Rated Output(Electrical adjustment) |
| Gain adjustable |
Approx. ±5%Rated Output(Electrical adjustment) |
| Minimum Resolution |
0.001%Rated Output |
| Slip ring rotation noise |
Less than 50µ Vp-p |
| Bandwidth |
Approx. 2Hz/-3dB |
| Overload Protection |
120 % Rated Capacity |
| Power |
±15V±10% less than DC 50mA |
| Output |
0V to +10V output impedance 500ohms |
| Operating Temperature Range |
0ºC to +50ºC Celciuss |
| Rotate direction |
Both |
| Material |
SUS, 304 |
| Cable |
Φ10, 6 wires shield cable 10m NDIS connector(M) |
| Accessory cable |
Φ10, 6 wires shield cable 10m NDIS connector(F) |
| Other |
Oil seal has to be changed, if leak increases in vacuum. |
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| Figure of dimensions (mm) |
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